Semiconductor Development Requirements For Electronic Gases

- Aug 06, 2018 -

With the development of semiconductor integrated circuit technology, the purity and quality requirements of electronic gas are getting higher and higher. The current development goal of China's electronic gas is to increase varieties, increase production, increase localization rate, and complete the production and application of special gas. The goal of a full set of technology development, including: high-risk, flammable and explosive, corrosive, highly toxic gas purification, monitoring, filling, transportation, storage technology, as well as safety, environmental technology, on-site gas distribution technology, recycling and reuse Technology, etc.


At the same time, in order to improve the efficiency of the use of mixed gas, solve the problem of safe use and transportation of electronic gas, especially high-purity fluorine gas, to promote the use of green gas, and to meet the cost of reducing exhaust gas and environmental protection requirements, thereby determining the development direction of high-purity electronic gas. For: green gas, on-site technology and recycling technology.