Precautions for Storage, Transportation, and Handling of Nitrogen Trifluoride in Electronic Gases

- Jun 07, 2018-

The nitrogen trifluoride of the electron gas is an odorless, colorless, and stable gas at room temperature, and is a strong oxidant when used. The trifluoride nitrogen of the electron gas is used as a material in the microelectronics industry. An excellent plasma etching gas, which is split into active fluoride ions during ion etching, has excellent etching rates and selectivity for silicon and tungsten compounds and high purity nitrogen trifluoride.

Electron gas trifluoride nitrogen does not leave any residue on the surface of the product when it is etched. It has very good cleaning agent when used, and to a certain extent, it is also used in chip manufacturing and high-energy laser.

Electronic gas nitrogen trifluoride storage and transportation

1. The gas cylinders of nitrogen trifluoride of electronic gas should be stored in a cool, ventilated warehouse to a certain extent. When used, the nitrogen trifluoride gas cylinders should be kept away from fire, heat, direct sunlight, and reducing agents. Separate fuel or combustible materials.

2. The nitrogen trifluoride cylinders should be lightly loaded and unloaded during handling to prevent damage to the cylinders and accessories.

3. The transport of nitrogen trifluoride bottles is shipped as dangerous goods. During transportation, the nitrogen trifluoride cylinders are fixed with cylinder holders and transported by roads of automobiles or ships.

Electronic gas nitrogen trifluoride operation precautions

The nitrogen trifluoride of the electronic gas needs to be shut down to some extent, so that it can provide adequate local exhaust ventilation and full ventilation to a certain extent. Its operators must undergo special training to strictly observe the regulations to some extent. Operating procedures, it is recommended that operators wear self-priming filter type gas masks (half-mask), wear safety glasses, wear protective clothing, and wear rubber gloves.


The degree of nitrogen trifluoride in electronic gas needs to be far away from its heat source, fire type, and workplace. It is strictly forbidden to smoke and away from flammable and flammable substances. Prevent gas from leaking into the workplace air. Avoid contact with reducing agents. Wear a cylinder helmet and a shock-proof rubber band when handling to prevent collision and damage of the cylinder. Equipped with the appropriate types and quantities of fire-fighting equipment and emergency response equipment.