Engineering composition and design requirements for gas supply systems for bulk gases

- Jul 02, 2019-

When the bulk gas is used, the gas used in the integrated circuit chip factory can be divided into two types according to the amount of use: a large amount of gas is called a bulk gas, and a small amount is called a special gas.

Bulk gases usually include nitrogen, oxygen, hydrogen, argon, helium, etc., of which nitrogen is commonly used.

The bulk gas project is the centralized gas supply system project, which is divided into the gas source part, the conveying pipeline part, and the terminal configuration equipment part.

Large gas project centralized gas supply system engineering composition

Gas source part: gas storage device has GC/GR, mixed flow row, single bottle or double bottle multi-bottle panel, etc., according to different properties of gas, such as corrosion, toxic, flammable, explosive, special gas, GC, ordinary inert gas GR.

Pipeline: Different materials are made of different materials, such as special gas for double casing, EP grade stainless steel pipe for inner pipe, outer pipe for BA grade stainless steel pipe, and general gas for BA grade stainless steel pipe.

Terminal part: VMB/VMP, single panel. According to different gas properties, such as VMB for special gas and VMP for general gas.

Bulk gas engineering design and construction requirements:

1. The selection of pipe fittings, most of the industry use SUS316 stainless steel pipe, and the polishing grade of this pipe is different, but different gases have different requirements on pipe fittings, flammable, explosive and poisonous gas have higher requirements on pipe fittings. The requirements for ordinary electronic gases are relatively low.

2. Valve components are selected, different valves have different sealing properties, and the manufacturing process is also very different. For hazardous gases, use a valve with a higher seal line.

3. Decompression equipment selection, decompression equipment should be selected according to the gas delivery pressure, the decompression range should be reasonable, so that the pressure change is better.

4. Gas path leakage detection is an indispensable part of the whole project. Some dangerous gases are extremely dangerous after leakage, so there must be extremely strict requirements in terms of safety!