Electronic gas accuracy and development requirements

- Jun 17, 2019-

In the process of using electronic gas, the gas used in the semiconductor industry is mainly called electronic gas. When it is used, it can be classified into pure gas, high purity gas and semiconductor special material gas according to its category. Special material gases are mainly used for epitaxy, doping and etching processes, and high purity gases are mainly used as diluent gas and carrier gas. Electronic gas is an important branch of specialty gases. Electronic gases can be classified into electronic grades, LSI (large scale integrated circuit) grades, VLSI (very large scale integrated circuits) grades, and ULSI (very large scale integrated circuits) grades according to their purity grades and applications.

Electronic gas is an indispensable basic supporting source material for the development of integrated circuits, optoelectronics, microelectronics, especially ultra-large scale integrated circuits, liquid crystal display devices, semiconductor light-emitting devices and semiconductor materials. It is called "blood of the electronics industry". "Food", its purity and cleanliness directly affect the quality of optoelectronics, microelectronic components, integration, specific technical indicators and yield, and fundamentally restrict the accuracy of circuits and devices.

Electronic Gas Data Research Center With the rapid development of China's ultra-large-scale integrated circuits, flat panel displays, photovoltaic power generation and other industries, the demand for electronic gas market has increased significantly, and the localization of electronic specialty gases has become the trend of the times. It is understood that China has made gratifying progress in localization: domestic high-purity ammonia has changed the monopoly market of foreign gas companies, and the era of high-purity carbon tetrafluoride "valuable and out of stock" has also come to an end. High-purity hydrogen chloride has successfully opened up in China. market. www.wxytgas.com