Krypton Fluoride Mixtures

Krypton Fluoride Mixtures

Krypton Fluoride Mixtures (Kr & F2) introduction Krypton Fluoride Mixtures are used in 248nm lithography applications, usually in conjunction with an inert gas mixture. For Excimer Laser Mixtures, there are several combinations of gases depending on the intended use. Some are combinations of...
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Krypton Fluoride Mixtures are used in 193nm lithography applications, usally in conjunction with and inert gas mixture.For Excimer Laser Mixtures, there are several combinations of gases depending on the intended use. Some are combinations of Fluorine and Argon, Fluorine and Krypton, and Hydrogen Chloride and Xenon. We has a variety of Excimer laser mixtures for all types of applications.

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